Bokhoni ba ho Sebetsa Lense ea Calcium Fluoride (CaF₂)

Bokhoni ba ho Sebetsa Lense ea Calcium Fluoride (CaF₂)

Calcium fluoride (CaF₂) ke thepa ea bohlokoa ea kristale ea optical. Ka lebaka la phetiso ea eona e pharaletseng haholo ho tloha ho deep ultraviolet (DUV) ho ea ho mid-infrared (MIR), e sebelisoa haholo tšimong ea optical. CaF₂ ha e bontše birefringence ea bohlokoa ea intrinsic ho maqhubu a bolelele bo ka holimo ho 200 nm, e leng se etsang hore e lokele litsamaiso tsa optical tsa polarization tse nepahetseng haholo. Ka thepa ea eona ea optical ea ho hasana ho tlase le moeli o phahameng oa tšenyo ea laser, hammoho le ho monya ho tlase, e ka mamella mahlaseli a laser a matla a phahameng. Ke thepa e loketseng merero ea ho shebisisa le lifensetere tsa khanya litsamaisong tse tebileng tsa lithography tsa ultraviolet, 'me hape ke thepa ea bohlokoa bakeng sa li-laser tsa ultraviolet tse matla a phahameng le li-optic tsa laser tsa excimer. Ho latela ts'ebeliso, thepa ea CaF₂ e sebetsoa ka likarolo tsa optical tse kang li-prism tse arohanang ka mahlaseli, lifensetere le lilense.

Matlotlo a Optical a Calcium Fluoride

1. Sebaka sa phetisetso: 0.13 μm (ultraviolet e tebileng) ho isa ho 9 μm (infrared e bohareng).

2. Sebaka sa UV (< 200 nm): phetiso e feta 90%, e phahametse silika e kopantsoeng.

3. Sebaka sa IR (3–5 μm): phetiso > 95%, e loketse litsamaiso tsa ho nka litšoantšo tsa mocheso.

4. Letšoao la refractive: ho hasana ho tlase le ho tlase (n = 1.43 @ 200 nm, n = 1.40 @ 5 μm), e loketse moralo oa ho roala o thibelang ho bonahatsa ka broadband.

5. Litšobotsi tsa ho monya: Khalsiamo fluoride ea sehlopha sa UV le VUV ha e bontše ho monya ho hoholo ka tlase ho 250 nm, e leng se etsang hore e lokele likarolo tsa optical ho seheng, ho tšoaea le lisebelisoa tse ling ka laser ea ultraviolet, ho netefatsa phetiso e sebetsang hantle ea matla a laser.

Litlhaloso tsa ho Sibolla Lense ea Calcium Fluoride 

Tšebeliso ea Lilense tsa Calcium Fluoride

1. Mekhoa ea ho Sebetsa ka Tebileng ea Ultraviolet Lithography

Mechini ea Lithography ea 193 nm: Tlhahisong ea li-semiconductor, calcium fluoride ea sehlopha sa excimer e sebelisoa mererong ea lithography, e kopantsoeng le li-laser tsa excimer tsa 193 nm ho fihlela ho pepesehela paterone ea chip ea nanometer-scale. Ho monngoa ho fokolang le ho tšoana ho hoholo ha CaF₂ ho netefatsa qeto ea lithography.

Li-Laser tsa DUV: Li sebelisoa e le lifensetere tsa tlhahiso bakeng sa li-laser tsa excimer (tse kang ArF, bolelele ba wavelength ba 193 nm), tse khonang ho mamella mahlaseli a laser a maqhubu a phahameng le a matla a holimo.

2. Mekhoa ea ho Etsa Litšoantšo ea Infrared le Ultraviolet

Litšoantšo tsa Thermal tse nang le Infrared: Lilense tsa calcium fluoride tsa sehlopha sa IR li bontša phetiso e phahameng sehlopheng sa 3-5 μm, li tsepamisa maikutlo mahlaseling a infrared a ntšitsoeng ke lintho ka katleho, li thusa ho etsa litšoantšo bosiu kapa libakeng tse thata. Li sebelisoa haholo ts'ireletsong, tlhahlobong le masimong a mang. Litšoantšo tsa Vacuum Ultraviolet: Calcium fluoride ea sehlopha sa VUV e ka fetisa leseli la vacuum ultraviolet ka holimo ho 130 nm, 'me e ka sebelisoa ho fumaneng khanya ea ultraviolet ea microscopic ea baeloji le litsamaisong tsa litšoantšo tsa ultraviolet tse feteletseng ho hlahlobeng sebaka.

3. Li-Interferometer le Li-Spectrometer

Li-Interferometer: Li sebelisa ho hasana ho tlase le ho tšoana ho hoholo ha calcium fluoride, li sebelisetsoa ho lemoha liphoso tsa sebopeho sa bokaholimo ba likarolo tsa optical, ho netefatsa botsitso le ho nepahala ha li-fringe tsa tšitiso.

Li-spectrophotometer: Calcium fluoride e sebetsa e le prism le thepa ea fensetere. Ka ho sebelisa phetiso ea eona e phahameng ho tloha ho ultraviolet ho ea ho infrared, e netefatsa hore leseli la maqhubu a fapaneng a maqhubu le ka feta ka nepo, e ntlafatsa ho nepahala ha tlhahlobo.