Lilense le Lifensetere tsa Optical Grade Calcium Fluoride (CaF2)

Lilense le Lifensetere tsa Optical Grade Calcium Fluoride (CaF2)

Calcium Fluoride (CaF₂) ke thepa ea bohlokoa ea kristale ea optical e sebelisoang haholo tšimong ea optical ka lebaka la phetiso ea eona e pharaletseng haholo ho tloha ho deep ultraviolet (DUV) ho ea ho mid-infrared (MIR). Calcium fluoride ha e bontše birefringence ea bohlokoa ea intrinsic e fetang 200nm, e leng se etsang hore e lokele litsamaiso tsa optical tsa polarization tse nepahetseng haholo. Ka ho hasana ho tlase, moeli o phahameng oa tšenyo e bakoang ke laser, le ho monya ho tlase, e ka mamella mahlaseli a laser a matla a phahameng. Ke thepa e loketseng bakeng sa lilense tse shebiloeng le lifensetere tsa khanya litsamaisong tsa DUV lithography, hammoho le thepa ea bohlokoa bakeng sa li-laser tsa UV tse matla a phahameng le li-laser optics tsa excimer.

Ho latela boemo ba ts'ebeliso, calcium fluoride e ka etsoa ka likarolo tse fapaneng tsa optical ho kenyeletsoa le li-prism tse arolang mahlaseli, lifensetere le lilense.

 

Sebaka sa Phetisetso:0.13μm (DUV) ~ 9μm (MIR)

Sebaka sa UV (<200nm)Phetiso ho fihlela ho >90%, e phahametse silika e kopantsoeng

Sebaka sa IR (3-5μm):Phetiso >95%, e loketse litsamaiso tsa litšoantšo tsa mocheso

Index ea Refractive:Ho hasana ho tlase le ho tlase (n=1.43 @200nm, n=1.40 @5μm), ho loketse moralo oa ho roala o thibelang ho bonahatsa ha broadband.


Qaqiso ea Sehlahisoa

Li-tag tsa Sehlahisoa

Paramethara E tloaelehileng Ho nepahala Ho nepahala ho Hoholo
Sebopeho / Sehlahisoa Lense ea Plano, fensetere ea wedge, karohano ea mahlakore, sepheo sa laser ea UV Lifensetere, plano-convex, plano-concave, biconvex, biconcave, chitja, aspherical, prism ea angle e nepahetseng, prism ea ho hasana ka ho lekana, cylindrical —
Bolelele ba Maqhubu a Moralo Phetiso e phahameng ea 0.18 – 8μm — —
Tekanyo ea Tekanyo 10mm – 80mm — —
Mamello ea Tekanyo ± 0.1mm ± 0.025mm ± 0.01mm
Mamello ea Botenya ± 0.1mm ± 0.025mm ± 0.01mm

Likopo

1. DUV Lithography Systems CaF₂ ea sehlopha sa Excimer e sebelisoa ho lilense tsa 193nm lithography tse ikemiseditseng le lifensetereng tsa tlhahiso ea laser ea excimer bakeng sa ho etsa lipaterone tsa nano tsa semiconductor, tse nang le homogeneity e tlase le ho mamella mahlaseli a laser a matla a phahameng.
2.Sistimi ea Litšoantšo tsa IR le UV Lilense tsa CaF₂ tsa boemo ba IR li fana ka phetiso e phahameng ho 3–5 μm bakeng sa litšoantšo tsa mocheso oa infrared bakeng sa ts'ireletso le tlhahlobo. CaF₂ ea boemo ba VUV e fetisa >130nm vacuum UV, e loketseng microscopy ea fluorescence ea UV le setšoantšo sa sebaka sa EUV.
3. Li-Interferometer le Li-Spectrometer Ho hasana ho tlase ha CaF₂ le ho tšoana ho hoholo ho nolofalletsa tlhahlobo e nepahetseng ea bokaholimo ba optical. Jwalo ka li-prism le lifensetere, phetiso ea eona e pharaletseng ea UV-IR e ntlafatsa ho nepahala ha tekanyo ea spectral.


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